Heating like in space
Vacuum heating solution for the semiconductor and coating industry
The order came from the coating industry: "We need a substrate heater or a radiant heater for drying substrates at 850°C in a vacuum." The ThermoExperts were happy to take on the challenge of homogeneous heat distribution and ultimately developed, designed and produced an optimum solution for this customer-specific application: the result is a mineral-insulated sheathed heating conductor with seamless cold ends including a vacuum-compatible flange feedthrough, with the ends of the heating conductor and the thermocouples being guided out of the vacuum. Temperature monitoring is traditionally carried out by the sheath thermocouples. The flanges then passed the leak test for tightness. The highlight: the surface of the radiant heater, i.e. the plate, does not warp at all during the process!