Heating like in space
Heating solution in vacuum for semiconductor and coating industry
The order came from the coating industry: "We need a substrate heater or a radiation heater for drying substrate at 850°C in a vacuum." The ThermoExperts gladly accepted the challenge of homogeneous heat distribution and finally developed, designed and produced an optimal solution for this customer-specific application: a mineral-insulated sheathed heating conductor with transitionless cold ends including a flange bushing suitable for vacuum are the result, whereby the ends of the heating conductor and the thermocouples are led out of the vacuum. Temperature monitoring is classically performed by the sheathed thermocouples. During the leaktest, the flanges then passed the test for tightness. The highlight: The surface of the radiant heater, i.e. the plate, does not warp at all during the process!
